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ASML Says First High-NA EUV Chips Due Within Months

GateNews

2026-05-20 01:01:50

According to Reuters, ASML announced on May 19 at an imec conference in Antwerp that the first chips produced with its next-generation High-NA EUV machines should arrive within months. CEO Christophe Fouquet said the first products would include memory and logic chips, and noted the systems are expensive, still requiring qualification, but intended to cut patterning costs over time. TSMC indicated in April that the machines, which can cost up to US$400 million each, are too expensive for now and plans to continue using ASML's current EUV tools for the next several chip generations, while Intel and memory makers such as SK Hynix have signaled earlier adoption.

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